Open AccessAdvanced micromechanisms in a multilevel polysilicon technology
Author(s) -
M.S. Rodgers,
Jeffry J. Sniegowski,
S. L. Miller,
C.C. Barron,
P. J. McWhorter
Publication year - 1997
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.284507
Subject(s) - fabrication , shutter , surface micromachining , materials science , flexibility (engineering) , computer science , interconnection , hinge , bulk micromachining , mechanical engineering , engineering , medicine , computer network , statistics , alternative medicine , mathematics , pathology
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