Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer | Zendy

Qiang Zou | Zendy; Deren Lu | Zendy; Baoqing Li | Zendy; Xingguo Xiong | Zendy; Bin Xiong | Zendy; Weiyuan Wang | Zendy

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<title>Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer</title>

Author(s) -

Qiang Zou,

Deren Lu,

Baoqing Li,

Xingguo Xiong,

Bin Xiong,

Weiyuan Wang

Publication year - 1997

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.284492

Subject(s) - accelerometer , surface micromachining , fabrication , materials science , microelectromechanical systems , bulk micromachining , cantilever , etching (microfabrication) , optoelectronics , capacitive sensing , silicon , electrical engineering , nanotechnology , composite material , engineering , computer science , medicine , alternative medicine , pathology , layer (electronics) , operating system

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