Open Access<title>Micromechanical structures and microelectronics for acceleration sensing</title>
Author(s) -
Brady R. Davies,
Stephen Montague,
James H. Smith,
Mark Lemkin
Publication year - 1997
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.284486
Subject(s) - accelerometer , microelectronics , microelectromechanical systems , acceleration , electrical engineering , engineering , chip , computer science , focus (optics) , electronic engineering , materials science , physics , nanotechnology , classical mechanics , operating system , optics
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