The effect of deposition process parameters on thin film coatings for the Athena X-ray optics | Zendy

Sonny Massahi | Zendy; Desirée Della Monica Ferreira | Zendy; Finn E. Christensen | Zendy; Nis C. Gellert | Zendy; Sara Svendsen | Zendy; Peter L. Henriksen | Zendy; Arne S. Jegers | Zendy; Maximilien J. Collon | Zendy; Boris Landgraf | Zendy; David Girou | Zendy; Aniket Thete | Zendy; Brian Shortt | Zendy; Ivo Ferreira | Zendy; Marcos Bavdaz | Zendy; Waldemar Schönberger | Zendy; Axel Langer | Zendy

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The effect of deposition process parameters on thin film coatings for the Athena X-ray optics

Author(s) -

Sonny Massahi,

Desirée Della Monica Ferreira,

Finn E. Christensen,

Nis C. Gellert,

Sara Svendsen,

Peter L. Henriksen,

Arne S. Jegers,

Maximilien J. Collon,

Boris Landgraf,

David Girou,

Aniket Thete,

Brian Shortt,

Ivo Ferreira,

Marcos Bavdaz,

Waldemar Schönberger,

Axel Langer

Publication year - 2021

Publication title -

technical university of denmark, dtu orbit (technical university of denmark, dtu)

Language(s) - English

Resource type - Conference proceedings

DOI - 10.1117/12.2594422

Subject(s) - thin film , materials science , surface roughness , coating , x ray optics , optical coating , substrate (aquarium) , silicon , deposition (geology) , optics , surface finish , composite material , optoelectronics , nanotechnology , x ray , physics , paleontology , oceanography , sediment , geology , biology

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