Open AccessDetermining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions
Author(s) -
Mohamed Abaidi,
Jordan Belissard,
Nivea G. Schuch,
Thiago Figueiro,
Matthieu Milléquant,
Jonathan Pradelles,
L. Perraud,
Jessy Bustos,
Jean-Baptiste Henry,
Estelle Guyez,
Sébastien Berard-Bergery,
Patrick Schiavone
Publication year - 2021
Publication title -
metrology, inspection, and process control for semiconductor manufacturing xxxv
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2584040
Subject(s) - function (biology) , surface finish , surface roughness , materials science , computer science , composite material , biology , evolutionary biology
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