Open AccessOptimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform
Author(s) -
S. Monfray,
S. Crémer,
Nathalie Vulliet,
Emmanuel Dubois,
Florian Domengie,
Sébastien Jan,
Francoise Baille,
F. Bœuf
Publication year - 2020
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2554725
Subject(s) - photonics , cutoff frequency , cutoff , modulation (music) , phase (matter) , amplitude , optoelectronics , materials science , phase modulation , computer science , electronic engineering , engineering , optics , physics , acoustics , quantum mechanics
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