Open Access<title>Friction in surface-micromachined microengines</title>
Author(s) -
S. L. Miller,
Jeffry J. Sniegowski,
Glen LaVigne,
P. J. McWhorter
Publication year - 1996
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.240444
Subject(s) - microelectromechanical systems , fabrication , measure (data warehouse) , mechanical engineering , surface micromachining , friction coefficient , materials science , mechanical system , computer science , surface (topology) , mechanics , physics , nanotechnology , engineering , composite material , medicine , alternative medicine , geometry , mathematics , pathology , database
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