Open AccessThe ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors
Author(s) -
Ian Lacey,
Kevan Anderson,
Gary P. Centers,
Ralf D. Geckeler,
Gevork S. Gevorkyan,
John Grossiord,
A. Just,
Theo Nicolot,
Brian V. Smith,
Valeriy V. Yashchuk
Publication year - 2018
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2321347
Subject(s) - optics , metrology , surface metrology , computer science , calibration , system of measurement , physics , surface roughness , profilometer , quantum mechanics , astronomy
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