Open AccessLarge (GeTe):(Sb2Te3) ratio phase change memory thin films
Author(s) -
Petr Němec,
Marek Bouška,
Stanislav Péchev,
Quentin Simon,
Virginie Nazabal,
Jan Gutwirth
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1117/12.2306503
Subject(s) - thin film , materials science , ellipsometry , analytical chemistry (journal) , reflectometry , x ray crystallography , scanning electron microscope , diffraction , optics , chemistry , nanotechnology , time domain , physics , chromatography , computer science , composite material , computer vision
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