Open AccessLow loss grating coupled optical interfaces for large volume fabrication with deep ultraviolet optical lithography
Author(s) -
Carlos A. Alonso-Ramos,
Sylvain Guerber,
Diego PérezGalacho,
Vladyslav Vakarin,
Xavier Le Roux,
Guillaume Marcaud,
Éric Cassan,
Delphine MarrisMorini,
Pavel Cheben,
F. Bœuf,
Charles Baudot,
Laurent Vivien,
Daniel Benedikovič
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2306258
Subject(s) - grating , lithography , photonics , optoelectronics , materials science , insertion loss , silicon on insulator , optics , coupling loss , photolithography , optical fiber , silicon , physics
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