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Growth of bio sensor materials by physical vapor transport method
Author(s) -
Ching Hua Su,
K. D. Mandal,
FowSen Choa,
Tara S. Carpenter,
N. B. Singh,
David Sachs,
Bradley Arnold,
Brian M. Cullum
Publication year - 2018
Publication title -
nasa sti repository (national aeronautics and space administration)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1117/12.2303665
Subject(s) - physical vapor deposition , chemical vapor deposition , materials science , deposition (geology) , nanotechnology , thin film , substrate (aquarium) , semiconductor , atomic layer deposition , chemical engineering , optoelectronics , geology , engineering , paleontology , oceanography , sediment
Recently there is a big thrust on bio-inspired sensors and there has been a large rise in the investment and expectations for nanotechnology to meet these goals. For in situ sensor development materials deposition on substrate is essential part of device development. Physical vapor deposition (PVD), chemical vapor deposition (CVD) and molecular organic vapor deposition methods have developed for growth of semiconductor bulk and thin film growth with some modifications have been used for these materials. Oxides and other elements of VI group such as sulfides and selenides are key components in skins of many species. Growth of ordered structures containing these elements have been achieved by using PVD method. This paper describes effect of growth parameters during PVD growth on the quality of materials. Growth kinetics and mechanism will be discussed for the vertical and horizontal growth reactors. Since most of the efficient materials systems are multinary and in many cases noncongruent, PVD provides pathway to grow materials below melting temperature.

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