Open AccessInfluence of template fill in graphoepitaxy DSA
Author(s) -
Jan Doise,
Joost Bekaert,
Boon Teik Chan,
Sung-Eun Hong,
Guanyang Lin,
Roel Gronheid
Publication year - 2016
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2219580
Subject(s) - materials science , process (computing) , epitaxy , surface energy , layer (electronics) , node (physics) , optoelectronics , nanotechnology , computer science , composite material , operating system , structural engineering , engineering
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