Open Access<title>Neural manufacturing: a novel concept for processing modeling, monitoring, and control</title>
Author(s) -
Chi Y. Fu,
Loren Petrich,
B. Law
Publication year - 1995
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.221322
Subject(s) - downtime , artificial neural network , flexibility (engineering) , semiconductor device fabrication , computer science , fuzzy logic , semiconductor industry , fuzzy control system , artificial intelligence , process (computing) , process control , manufacturing engineering , engineering , electrical engineering , statistics , mathematics , wafer , operating system
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