Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films | Zendy

Johannes Rittinger | Zendy; Piriya Taptimthong | Zendy; Lisa Jogschies | Zendy; Marc Christopher Wurz | Zendy; Lutz Rissing | Zendy

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Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films

Author(s) -

Johannes Rittinger,

Piriya Taptimthong,

Lisa Jogschies,

Marc Christopher Wurz,

Lutz Rissing

Publication year - 2015

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.2178765

Subject(s) - permalloy , kapton , materials science , magnetoresistance , polyimide , thin film , substrate (aquarium) , polymer substrate , composite material , magnetometer , magnetic anisotropy , surface roughness , magnetic field , foil method , magnetization , anisotropy , polymer , layer (electronics) , optics , nanotechnology , oceanography , physics , quantum mechanics , geology

We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM). © 2015 COPYRIGHT SPIE

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