Analysis of surfaces, films, and multilayers by resonant laser ablation | Zendy

Todd M. Allen | Zendy; Catherine H. Smith | Zendy; Peter B. Kelly | Zendy; John E. Anderson | Zendy; Gregory C. Eiden | Zendy; Aaron W. Garrett | Zendy; Chris G. Gill | Zendy; P. H. Hemberger | Zendy; N. S. Nogar | Zendy

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<title>Analysis of surfaces, films, and multilayers by resonant laser ablation</title>

Author(s) -

Todd M. Allen,

Catherine H. Smith,

Peter B. Kelly,

John E. Anderson,

Gregory C. Eiden,

Aaron W. Garrett,

Chris G. Gill,

P. H. Hemberger,

N. S. Nogar

Publication year - 1995

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.206451

Subject(s) - laser ablation , laser , ablation , materials science , mass spectrometry , optics , ion , spectrometer , optoelectronics , thin film , analytical chemistry (journal) , atomic physics , physics , chemistry , nanotechnology , engineering , chromatography , quantum mechanics , aerospace engineering

In this manuscript we review briefly the history of Resonant Laser Ablation (RLA), and discuss some current ideas regarding sample preparation, laser parameters, and mechanisms. We also discuss current applications including spectral analysis of trace components, depth profiling of thin films and multilayer structures, and the use of RLA with the Ion Trap Mass Spectrometer (ITMS).

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