Open AccessAt-wavelength metrology of x-ray optics at Diamond Light Source
Author(s) -
Hongchang Wang,
Sébastien Bérujon,
John P. Sutter,
Simon G. Alcock,
Kawal Sawhney
Publication year - 2014
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2062828
Subject(s) - optics , metrology , x ray optics , beamline , synchrotron radiation , physics , interferometry , grating , physical optics , x ray , beam (structure)
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