3D-form metrology of arbitrary optical surfaces by absorption in fluids | Zendy

Juan Carlos Martínez-Antón | Zendy; Juan Manuel Plaza Ortega | Zendy; José Alonso | Zendy

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3D-form metrology of arbitrary optical surfaces by absorption in fluids

Author(s) -

Juan Carlos Martínez-Antón,

Juan Manuel Plaza Ortega,

José Alonso

Publication year - 2013

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.2030508

Subject(s) - metrology , optics , surface (topology) , chromatic scale , materials science , nanometre , absorption (acoustics) , surface finish , measure (data warehouse) , physics , computer science , geometry , mathematics , database , composite material

We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish

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