Experimental techniques for aberration retrieval with through-focus intensity images
Author(s) -
Silvania F. Pereira,
Axel Wiegmann,
Nitish Kumar,
Alberto da Costa Assafrao,
Alessandro Polo,
Lei Wei,
Sven van Haver
Publication year - 2012
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.2000376
Subject(s) - zernike polynomials , optics , diffraction , focus (optics) , intensity (physics) , computer science , spherical aberration , exit pupil , physics , wavefront , pupil , lens (geology)
Measurement techniques to determine the aberration of an optical system, by obtaining through-focus intensity images that are produced when the object is a point source at infinity, are shown. The analysis of the aberrations is made using the extended version of the Nijboer-Zernike diffraction theory. This theory provides a semi analytical solution of the Debye diffraction integral and thus a direct relation between the intensity distribution of the field at the focal region and the exit pupil of the optical syste
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