Open AccessOptical analysis of complex multilayer structures using multiple data types
Author(s) -
Blaine Johs,
Roger H. French,
Franklin D. Kalk,
William A. McGahan,
John A. Woollam
Publication year - 1994
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.192054
Subject(s) - ellipsometry , materials science , optics , reflection (computer programming) , photomask , 3d optical data storage , optoelectronics , thin film , computer science , resist , nanotechnology , physics , layer (electronics) , programming language
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