Open Access<title>Rate-controlled synthesis of composition-modulated metal oxide thin films</title>
Author(s) -
Alan F. Jankowski
Publication year - 1994
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.185794
Subject(s) - sputtering , oxide , materials science , sputter deposition , metal , deposition (geology) , thin film , chemical engineering , inorganic chemistry , analytical chemistry (journal) , metallurgy , nanotechnology , chemistry , paleontology , chromatography , sediment , engineering , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom