Open Access<title>Defect geometries and laser-induced damage in multilayer coatings</title>
Author(s) -
R. J. Tench,
Mark R. Kozlowski,
Robert H. Chow
Publication year - 1994
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.185777
Subject(s) - materials science , coating , scanning electron microscope , focused ion beam , laser , atomic force microscopy , microscopy , optical microscope , electron microscope , composite material , optics , optoelectronics , ion , nanotechnology , chemistry , physics , organic chemistry
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