Open AccessElectrostatic reduction of particulates for laser resistant hafnia coatings
Author(s) -
Mark G. Miller,
Robert H. Chow,
Gary E. Loomis
Publication year - 1994
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.180894
Subject(s) - hafnia , materials science , electrode , silicon , deposition (geology) , wafer , particulates , plume , electric field , optoelectronics , composite material , meteorology , chemistry , geology , cubic zirconia , ceramic , paleontology , physics , organic chemistry , quantum mechanics , sediment
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