Open Access<title>Integrated microgyroscope</title>
Author(s) -
Timothy J. Hawkey,
R. Torti
Publication year - 1992
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.138139
Subject(s) - gyroscope , microfabrication , aerospace , electronics , microelectromechanical systems , engineering , electrical engineering , automotive engineering , computer science , electronic engineering , mechanical engineering , control engineering , aerospace engineering , materials science , nanotechnology , medicine , alternative medicine , pathology , fabrication
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