Technology and applications of micromachined silicon adaptive mirrors | Zendy

Gleb Vdovin | Zendy; S. Middelhoek | Zendy; P.M. Sarro | Zendy

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Technology and applications of micromachined silicon adaptive mirrors

Author(s) -

Gleb Vdovin,

S. Middelhoek,

P.M. Sarro

Publication year - 1997

Publication title -

optical engineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.357

H-Index - 105

eISSN - 1560-2303

pISSN - 0091-3286

DOI - 10.1117/1.601334

Subject(s) - silicon , materials science , surface micromachining , adaptive optics , computer science , optoelectronics , optical engineering , silicon on insulator , optics , fabrication , physics , medicine , alternative medicine , pathology

The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m with linear frequency response in the range of 50 Hz to 1 kHz, are fabricated on standard PCB substrates. Advanced devices with hundreds of control channels, demanding integration of driver and switching electronics, are currently under developmentElectrical Engineering, Mathematics and Computer Scienc

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