Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method | Zendy

Yen-Min Lee | Zendy; JiaHan Li | Zendy; Philip C. W. Ng | Zendy; Ting-Hang Pei | Zendy; Fu-Min Wang | Zendy; Kuen-Yu Tsai | Zendy; Alek C. Chen | Zendy

Open Access

Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method

Author(s) -

Yen-Min Lee,

JiaHan Li,

Philip C. W. Ng,

Ting-Hang Pei,

Fu-Min Wang,

Kuen-Yu Tsai,

Alek C. Chen

Publication year - 2010

Publication title -

journal of micro/nanolithography mems and moems

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.394

H-Index - 42

eISSN - 1932-5134

pISSN - 1932-5150

DOI - 10.1117/1.3503532

Subject(s) - finite difference time domain method , extreme ultraviolet , optics , computation , materials science , refractive index , wavelength , transmission line , scattering , extreme ultraviolet lithography , time domain , root mean square , computational physics , perfectly matched layer , transmission (telecommunications) , physics , mathematics , computer science , algorithm , telecommunications , laser , quantum mechanics , computer vision

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