Open AccessVertical electrothermal actuator with separated metal and nitride structural layers
Author(s) -
Jui-che Tsai
Publication year - 2009
Publication title -
journal of micro/nanolithography mems and moems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.394
H-Index - 42
eISSN - 1932-5134
pISSN - 1932-5150
DOI - 10.1117/1.3100208
Subject(s) - bimorph , actuator , materials science , displacement (psychology) , nitride , silicon nitride , vertical displacement , power (physics) , optoelectronics , power consumption , metal , composite material , silicon , electrical engineering , metallurgy , structural engineering , layer (electronics) , engineering , piezoelectricity , psychology , physics , quantum mechanics , psychotherapist
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