Open AccessVersatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures
Author(s) -
Mélanie V. Kessels,
Marwa El Bouz,
Robin Pagan,
Kevin Heggarty
Publication year - 2007
Publication title -
journal of micro/nanolithography mems and moems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.394
H-Index - 42
eISSN - 1932-5134
pISSN - 1932-5150
DOI - 10.1117/1.2767331
Subject(s) - stepper , reticle , photoresist , photomask , plot (graphics) , liquid crystal display , binary number , photolithography , feature (linguistics) , computer science , materials science , nanotechnology , optics , optoelectronics , wafer , resist , physics , mathematics , arithmetic , linguistics , statistics , philosophy , layer (electronics)
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