Open AccessDesign and performance verification of a microscope-based interferometer for miniature-specimen metrology
Author(s) -
Chih-Kung Lee,
Wen-Jong Wu,
Giin-Yuan Wu,
ChiaLing Li,
Zeng-De Chen,
Jau-Yu Chen
Publication year - 2005
Publication title -
optical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.357
H-Index - 105
eISSN - 1560-2303
pISSN - 0091-3286
DOI - 10.1117/1.2010147
Subject(s) - metrology , interferometry , microscope , optics , computer science , optical engineering , astronomical interferometer , microscopy , materials science , physics
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