Open AccessStructure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering
Author(s) -
Takeo Nakano,
Hyuga Taniguchi,
Nanako Dei,
Makoto Ozawa,
Md. Suruz Mian,
Kei Oya,
K. Murakami,
Masayoshi Nagao
Publication year - 2022
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0002201
Subject(s) - common emitter , triode , materials science , sputtering , optoelectronics , voltage , sputter deposition , electrode , nanotechnology , thin film , electrical engineering , chemistry , capacitor , engineering
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