Open AccessGrowth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy
Author(s) -
Sushrut Modak,
James Spencer Lundh,
Nahid Sultan Al-Mamun,
Leonid Chernyak,
Aman Haque,
Thieu Quang Tu,
Akito Kuramata,
Marko J. Tadjer,
S. J. Pearton
Publication year - 2022
Publication title -
journal of vacuum science and technology. a. vacuum, surfaces, and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0002115
Subject(s) - sapphire , cathodoluminescence , diamond , epitaxy , materials science , nanocrystalline material , raman spectroscopy , transmission electron microscopy , chemical vapor deposition , analytical chemistry (journal) , crystallography , optoelectronics , nanotechnology , layer (electronics) , chemistry , optics , luminescence , metallurgy , laser , physics , chromatography