Growth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy | Zendy

Sushrut Modak | Zendy; James Spencer Lundh | Zendy; Nahid Sultan Al-Mamun | Zendy; Leonid Chernyak | Zendy; Aman Haque | Zendy; Thieu Quang Tu | Zendy; Akito Kuramata | Zendy; Marko J. Tadjer | Zendy; S. J. Pearton | Zendy

Open Access

Growth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy

Author(s) -

Sushrut Modak,

James Spencer Lundh,

Nahid Sultan Al-Mamun,

Leonid Chernyak,

Aman Haque,

Thieu Quang Tu,

Akito Kuramata,

Marko J. Tadjer,

S. J. Pearton

Publication year - 2022

Publication title -

journal of vacuum science and technology a vacuum surfaces and films

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.583

H-Index - 112

eISSN - 1520-8559

pISSN - 0734-2101

DOI - 10.1116/6.0002115

Subject(s) - sapphire , cathodoluminescence , diamond , epitaxy , materials science , nanocrystalline material , raman spectroscopy , transmission electron microscopy , chemical vapor deposition , analytical chemistry (journal) , crystallography , optoelectronics , nanotechnology , layer (electronics) , chemistry , optics , luminescence , metallurgy , laser , physics , chromatography

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