Bandgap engineering of indium gallium nitride layers grown by plasma-enhanced chemical vapor deposition
Author(s) -
Jonathan Thomet,
Aman Kamlesh Singh,
Mélanie Nelly Rouèche,
Nils Toggwyler,
FranzJosef Haug,
Gabriel Christmann,
Sylvain Nicolay,
Christophe Ballif,
N. Wyrsch,
Aïcha HesslerWyser,
Mathieu Boccard
Publication year - 2022
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0002039
Subject(s) - trimethylindium , materials science , plasma enhanced chemical vapor deposition , band gap , trimethylgallium , chemical vapor deposition , indium nitride , crystallinity , nitride , gallium nitride , optoelectronics , analytical chemistry (journal) , metalorganic vapour phase epitaxy , epitaxy , nanotechnology , chemistry , composite material , layer (electronics) , chromatography
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