Open AccessSelectively patterned Mg-doped GaN by SiNx-driven hydrogen injection
Author(s) -
Hyunsoo Lee,
Mohammad Wahidur Rahman,
Darpan Verma,
Violet M. Poole,
Roberto C. Myers,
Matthew D. McCluskey,
Siddharth Rajan
Publication year - 2022
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0002029
Subject(s) - materials science , plasma enhanced chemical vapor deposition , doping , optoelectronics , chemical vapor deposition , annealing (glass) , photoluminescence , silicon nitride , plasma , silicon , nitride , resistive touchscreen , nanotechnology , composite material , layer (electronics) , physics , quantum mechanics , engineering , electrical engineering
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