Open AccessErratum: “Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules” [J. Vac. Sci. Technol. A 37, 021001 (2019)]
Author(s) -
Tanzia Chowdhury,
Romel Hidayat,
Tirta Rona Mayangsari,
Jiyeon Gu,
Hye-Lee Kim,
Jongwan Jung,
WonJun Lee
Publication year - 2022
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0001965
Subject(s) - silicon dioxide , fluorine , silicon , molecule , density functional theory , materials science , nanotechnology , chemical engineering , chemistry , computational chemistry , organic chemistry , optoelectronics , composite material , engineering , metallurgy
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