Open AccessScanning anode field emission microscopy of a single Si emitter
Author(s) -
Girish Rughoobur,
Olusoji O. Ilori,
Akintunde I. Akinwande
Publication year - 2022
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0001938
Subject(s) - common emitter , anode , field electron emission , materials science , field emitter array , wafer , radius , optoelectronics , current (fluid) , silicon , optics , electrode , electrical engineering , physics , electron , computer security , quantum mechanics , computer science , engineering
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