Open AccessOperating modes and target erosion in high power impulse magnetron sputtering
Author(s) -
Martin Rudolph,
N. Brenning,
Hamidreza Hajihoseini,
M. A. Raadu,
Joel Fischer,
Jón Tómas Guðmundsson,
Daniel Lundin
Publication year - 2022
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0001919
Subject(s) - high power impulse magnetron sputtering , cathode , sputtering , sputter deposition , materials science , magnetic field , cavity magnetron , impulse (physics) , atomic physics , optoelectronics , electrical engineering , physics , thin film , nanotechnology , engineering , quantum mechanics
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