Open AccessErratum: “Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation” [J. Vac. Sci. Technol. B 39, 054202 (2021)]
Author(s) -
Clément Bessouet,
Sylvain Lemettre,
Charlotte Kutyla,
Alain Bosseboeuf,
Philippe Coste,
Thierry Sauvage,
Hélène Lecoq,
Olivier Wendling,
Aurélien Bellamy,
Piyush Jagtap,
S. Escoubas,
C. Guichet,
Ο. Thomas,
Joanny Moulin
Publication year - 2021
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0001458
Subject(s) - yttrium , getter , titanium , materials science , ion , ion beam , metallurgy , optoelectronics , chemistry , organic chemistry , oxide
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