Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding | Zendy

Rahman SabahiKaviani | Zendy; Regina Lüttge | Zendy

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Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding

Author(s) -

Rahman SabahiKaviani,

Regina Lüttge

Publication year - 2021

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/6.0001333

Subject(s) - polydimethylsiloxane , mold , materials science , optical microscope , adhesive , molding (decorative) , composite material , ridge , pdms stamp , thin film , microscopy , optics , feature (linguistics) , transfer molding , fabrication , engineering drawing , nanotechnology , scanning electron microscope , layer (electronics) , physics , paleontology , linguistics , philosophy , engineering , biology , medicine , alternative medicine , pathology

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