Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms | Zendy

Neda Hesam Mahmoudi Nezhad | Zendy; Mohamad Ghaffarian Niasar | Zendy; A. Mohammadi Gheidari | Zendy; P. Kruit | Zendy; K. HAGEN | Zendy

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Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms

Author(s) -

Neda Hesam Mahmoudi Nezhad,

Mohamad Ghaffarian Niasar,

A. Mohammadi Gheidari,

P. Kruit,

K. HAGEN

Publication year - 2021

Publication title -

journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.429

H-Index - 119

eISSN - 2166-2754

pISSN - 2166-2746

DOI - 10.1116/6.0001274

Subject(s) - electrostatic lens , genetic algorithm , multi objective optimization , lens (geology) , process (computing) , computer science , electron , detector , cathode ray , algorithm , plane (geometry) , optimization problem , electron optics , electrode , optics , mathematical optimization , beam (structure) , physics , mathematics , quantum mechanics , operating system , geometry

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