Open AccessGreen CVD—Toward a sustainable philosophy for thin film deposition by chemical vapor deposition
Author(s) -
Henrik Pedersen,
Seán T. Barry,
Jonas Sundqvist
Publication year - 2021
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0001125
Subject(s) - chemical vapor deposition , sustainability , combustion chemical vapor deposition , nanotechnology , materials science , thin film , sustainable development , deposition (geology) , environmental science , carbon film , political science , geology , ecology , paleontology , sediment , law , biology
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