Open AccessElectrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation
Author(s) -
Clément Bessouet,
Sylvain Lemettre,
Charlotte Kutyla,
Alain Bosseboeuf,
Philippe Coste,
Thierry Sauvage,
Hélène Lecoq,
Olivier Wendling,
Aurélien Bellamy,
Piyush Jagtap,
S. Escoubas,
C. Guichet,
Ο. Thomas,
Joanny Moulin
Publication year - 2021
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0001084
Subject(s) - yttrium , materials science , getter , annealing (glass) , titanium , metallurgy , grain boundary , crystallite , thin film , grain size , microstructure , nanotechnology , optoelectronics , oxide
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