Open AccessConversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum
Author(s) -
Tyler J. Myers,
Austin M. Cano,
Diane K. Lancaster,
Joel W. Clancey,
Steven M. George
Publication year - 2021
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000680
Subject(s) - atomic layer deposition , x ray photoelectron spectroscopy , quartz crystal microbalance , x ray reflectivity , fourier transform infrared spectroscopy , layer (electronics) , thermogravimetric analysis , chemistry , energy conversion efficiency , analytical chemistry (journal) , materials science , chemical engineering , nanotechnology , thin film , organic chemistry , optoelectronics , adsorption , engineering
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