Open AccessOpportunities for ionic liquid/ionogel gating of emerging transistor architectures
Author(s) -
Rachel E. Owyeung,
Sameer Sonkusale,
Matthew J. Panzer
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000678
Subject(s) - transistor , materials science , gating , fabrication , nanotechnology , optoelectronics , capacitance , power gating , semiconductor , voltage , electrical engineering , electrode , engineering , chemistry , physiology , medicine , alternative medicine , pathology , biology
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