Surface preparation of porous Si-graphene nanocomposites for heteroepitaxy
Author(s) -
Mourad Jellite,
Maxime Dar,
Roxana Arvinte,
Mohammad Reza Aziziyan,
Denis Machon,
Abderraouf Boucherif,
Richard Arès
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000423
Subject(s) - materials science , nanocomposite , silicon , epitaxy , substrate (aquarium) , nucleation , porous silicon , carbon fibers , etching (microfabrication) , graphene , nanotechnology , carbonization , chemical engineering , composite material , layer (electronics) , scanning electron microscope , optoelectronics , composite number , oceanography , chemistry , organic chemistry , geology , engineering
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