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Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers
Author(s) -
Johan Zakrisson,
Isak Silander,
Clayton Forssén,
Martin Zelán,
Ove Axner
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000375
Subject(s) - refractometer , refractometry , fabry–pérot interferometer , materials science , deformation (meteorology) , hygrometer , refractive index , hydrostatic pressure , measurement uncertainty , optics , outgassing , atmospheric pressure , thermodynamics , chemistry , mathematics , composite material , optoelectronics , physics , organic chemistry , statistics , meteorology , wavelength , humidity

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