Open AccessAnomalous minority carrier behavior induced by chemical surface passivation solution in p-type GaSb metal–oxide–semiconductor capacitors on Si substrates
Author(s) -
Shun Sasaki,
Katherine Dropiewski,
Shailesh Madisetti,
Vadim Tokranov,
Michail M. Yakimov,
S. Oktyabrsky
Publication year - 2020
Publication title -
journal of vacuum science and technology b nanotechnology and microelectronics materials processing measurement and phenomena
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.429
H-Index - 119
eISSN - 2166-2754
pISSN - 2166-2746
DOI - 10.1116/6.0000169
Subject(s) - passivation , materials science , optoelectronics , capacitor , oxide , semiconductor , epitaxy , transmission electron microscopy , layer (electronics) , nanotechnology , metallurgy , voltage , physics , quantum mechanics
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