Open AccessErratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]
Author(s) -
Gregory N. Parsons,
Jeffrey W. Elam,
Steven M. George,
Suvi Haukka,
Hyeongtag Jeon,
W. M. M. Kessels,
Markku Leskelä,
Paul Poodt,
Mikko Ritala,
Steven M. Rossnagel
Publication year - 2020
Publication title -
journal of vacuum science and technology a vacuum surfaces and films
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.583
H-Index - 112
eISSN - 1520-8559
pISSN - 0734-2101
DOI - 10.1116/6.0000143
Subject(s) - atomic layer deposition , deposition (geology) , layer (electronics) , materials science , engineering physics , nanotechnology , physics , geology , paleontology , sediment
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