Open AccessReal-time composition control of InAlAs grown on InP using spectroscopic ellipsometry
Author(s) -
M. Beaudoin,
E. Grassi,
S. R. Johnson,
Ramaswamy Krishnaraj,
Konstantinos Tsakalis,
T. L. Alford,
Y.–H. Zhang
Publication year - 2000
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.591398
Subject(s) - parameterized complexity , ellipsometry , diffraction , materials science , in situ , composition (language) , stability (learning theory) , analytical chemistry (journal) , computer science , optoelectronics , chemistry , optics , thin film , algorithm , nanotechnology , physics , organic chemistry , chromatography , linguistics , philosophy , machine learning
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