Fabrication of high performance microlenses for an integrated capillary channel electrochromatograph with fluorescence detection | Zendy

J. R. Wendt | Zendy; Mial E. Warren | Zendy; William C. Sweatt | Zendy; Christopher G. Bailey | Zendy; Carolyn M. Matzke | Zendy; Don W. Arnold | Zendy; Andrew A. Allerman | Zendy; T. R. Carter | Zendy; Randolph E. Asbill | Zendy; S. Samora | Zendy

Open Access

Fabrication of high performance microlenses for an integrated capillary channel electrochromatograph with fluorescence detection

Author(s) -

J. R. Wendt,

Mial E. Warren,

William C. Sweatt,

Christopher G. Bailey,

Carolyn M. Matzke,

Don W. Arnold,

Andrew A. Allerman,

T. R. Carter,

Randolph E. Asbill,

S. Samora

Publication year - 1999

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.590991

Subject(s) - materials science , microlens , optoelectronics , optics , microfabrication , substrate (aquarium) , laser , vertical cavity surface emitting laser , lithography , etching (microfabrication) , reactive ion etching , fabrication , lens (geology) , nanotechnology , physics , alternative medicine , pathology , layer (electronics) , medicine , oceanography , geology

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