Closed-loop control of composition and temperature during the growth of InGaAs lattice matched to InP | Zendy

S. R. Johnson | Zendy; E. Grassi | Zendy; M. Beaudoin | Zendy; M. Boonzaayer | Zendy; Konstantinos Tsakalis | Zendy; Y. H. Zhang | Zendy

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Closed-loop control of composition and temperature during the growth of InGaAs lattice matched to InP

Author(s) -

S. R. Johnson,

E. Grassi,

M. Beaudoin,

M. Boonzaayer,

Konstantinos Tsakalis,

Y. H. Zhang

Publication year - 1999

Publication title -

journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena

Language(s) - English

Resource type - Journals

eISSN - 1520-8567

pISSN - 1071-1023

DOI - 10.1116/1.590729

Subject(s) - setpoint , thermocouple , mole fraction , pid controller , temperature control , substrate (aquarium) , analytical chemistry (journal) , control theory (sociology) , materials science , lattice (music) , feedback loop , chemistry , thermodynamics , physics , computer science , control (management) , acoustics , composite material , oceanography , computer security , chromatography , artificial intelligence , geology

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