Open AccessReflection high-energy electron diffraction during substrate rotation: A new dimension forin situcharacterization
Author(s) -
Wolfgang Braun,
H.J. Möller,
Y.–H. Zhang
Publication year - 1998
Publication title -
journal of vacuum science and technology b microelectronics and nanometer structures processing measurement and phenomena
Language(s) - English
Resource type - Journals
eISSN - 1520-8567
pISSN - 1071-1023
DOI - 10.1116/1.589976
Subject(s) - reflection high energy electron diffraction , electron diffraction , reciprocal lattice , reflection (computer programming) , diffraction , optics , rotation (mathematics) , kikuchi line , physics , materials science , geometry , mathematics , computer science , programming language
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